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CHAPTER 12 Nanocrystalline Diamond for R... > 12.10 Measurement and Analysis - Pg. 293

12.10 Measurement and Analysis 293 point of tin). During the diffusion process, one of the intermetallic com- pounds forms the bond between the two structures and is stable till 600°C. 12.10 MEASUREMENT AND ANALYSIS The diamond actuators are used to realize RF-MEMS DC contact type switches in CPW and microstrip topologies. The CPW transmission lines are designed on a 650- m thick alumina substrate ( r 9.9, tan 0.0002). The transmission lines are 3000- m long with a centre conductor width ( W ) of 100 m and slot width ( G ) of 50 m. The centre conductor of these lines is purposefully interrupted in the middle resulting in two transmission lines which are 1475- m long. During actuation, the contact pad in the diamond bridge closes this gap resulting in regular transmission line. Small signal measurements are done in the frequency span of 1­30 GHz using an Anritsu lightning vector network analyzer (VNA). A bias tee was used to protect the VNA test ports from DC current. Before measuring the structures, a probe-