Safari Books Online is a digital library providing on-demand subscription access to thousands of learning resources.
12.10 Measurement and Analysis 293 point of tin). During the diffusion process, one of the intermetallic com- pounds forms the bond between the two structures and is stable till 600°C. 12.10 MEASUREMENT AND ANALYSIS The diamond actuators are used to realize RF-MEMS DC contact type switches in CPW and microstrip topologies. The CPW transmission lines are designed on a 650- m thick alumina substrate ( r 9.9, tan 0.0002). The transmission lines are 3000- m long with a centre conductor width ( W ) of 100 m and slot width ( G ) of 50 m. The centre conductor of these lines is purposefully interrupted in the middle resulting in two transmission lines which are 1475- m long. During actuation, the contact pad in the diamond bridge closes this gap resulting in regular transmission line. Small signal measurements are done in the frequency span of 130 GHz using an Anritsu lightning vector network analyzer (VNA). A bias tee was used to protect the VNA test ports from DC current. Before measuring the structures, a probe-