CHAPTER 12 Nanocrystalline Diamond for RF-MEMS Applications S. Balachandran 1 , T. Weller 1 , A. Kumar 2 , S. Jeedigunta 1 , H. Gomez 2 , J. Kusterer 3 and E. Kohn 3 2 Department of Electrical Engineering, University of South Florida, Tampa, FL, USA Department of Mechanical Engineering, University of South Florida, Tampa, FL, USA 3 Institute of Electron Devices and Circuits, University of Ulm, Ulm, Germany 1 CON T E N T S