I NDEX AC measurement, 43 ADC. See analog-to-digital converter adsorbate, 25, 56, 60, 66, 156, 244, 334, 343, 344, 418 adsorbent, 56, 60, 343, 470 adsorption, 4, 5, 7, 20, 22­25, 27, 29, 55­57, 59­61, 64, 66, 70, 74, 81, 91, 94­96, 133, 134, 140, 145, 149, 151, 155­157, 189­194, 196, 197, 201, 202, 211, 216, 217, 223, 231, 241, 243, 244, 250, 261, 269, 271, 272, 274, 275, 301, 322­324, 327, 331, 334, 342­345, 351, 356, 360, 362, 363, 379, 380, 393, 412­414, 423, 425, 427, 428, 463, 469, 503 affi nity measurement, 423, 424 agglomeration, 80, 132 AlN. See aluminum nitrate AlPO 4 . See berlinite aluminum nitrate (AlN), 381, 382 microfluidic channels, 382 thin-film­based FBARs, 382 aluminum phosphate (AlPO 4 ). See berlinite AMS. See Austrian Microsystems analog-to-digital converter, 40, 493 anisotropic wet etching, 497 ANN. See artificial neural network annealing, 64, 75, 79, 80, 86, 88, 96­98, 109, 118, 119, 125, 132, 139, 151, 155, 158­160, 214, 243, 267, 268, 300, 303 antibody­antigen reaction, 380 aromatic hydrocarbon, 466, 471 artificial neural network, 50, 303, 305, 413, 429, 469 AT-cut quartz, 385, 386, 388, 390, 396, 397, 405, 406, 425 Au/Co 3 O 4 catalyst, 280 Austrian Microsystems, 490, 504 Au/TiO 2 catalyst, 279 automated detection, 447 ball milling, 80 band bending, 56, 64 band gap, 67, 156, 194, 204, 209, 510 barium titanate (BaTiO 3 ), 383, 448 BaTiO 3 . See barium titanate BAW. See bulk acoustic wave Behrndt, 378 berlinite (aluminum phosphate, AlPO 4 ), 384 biofilm, 380 biomolecular detection, 493 biosensor, 1, 3, 5, 7­10, 12, 15, 19, 315, 321, 324, 326, 328, 348, 360, 368, 377, 379­ 383, 389, 396, 416, 417, 421­425, 428, 493, 494 boron implantation, 496 breath analysis, 282 Bruckenstein and Shay, 379 BT-cut quartz, 385 bulk acoustic wave (BAW), 471 bulk leakage current, 205 bulk micromachining, 32, 119, 121, 122, 488, 497 calibration, 22, 32, 39, 44, 45, 48­50, 67, 117, 153, 154, 288, 313, 324, 343, 390, 474 515