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Characterization in Silicon Processing
Publisher: Momentum Press
Pub. Date: January 1, 2010
Print ISBN-13: 978-1-60650-109-2
Print ISBN-10: 1-60650-109-7
Pages in Print Edition: 240
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Overview
With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume in the Materials Characterization series focuses on the process flow of silicon wafer manufacture where materials properties, processing and ass
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Engineering
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Electrical Engineering > Semiconductor Technology
Table of Contents
