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Characterization in Silicon Processing > Preface to Series - Pg. x

Preface to Series This Materials Characterization Series attempts to address the needs of the practical materials user, with an emphasis on the newer areas of surface, interface, and thin film microcharacterization. The Series is composed of the leading volume, Encyclope- dia of Materials Characterization, and a set of about 10 subsequent volumes concen- trating on characterization of individual materials classes. In the Encyclopedia, 50 brief articles (each 10 to 18 pages in length) are presented in a standard format designed for ease of reader access, with straightforward tech- nique descriptions and examples of their practical use. In addition to the articles, there are one-page summaries for every technique, introductory summaries to group- ings of related techniques, a complete glossary of acronyms, and a tabular compari- son of the major features of all 50 techniques. The 10 volumes in the Series on characterization of particular materials classes include volumes on silicon processing, metals and alloys, catalytic materials, inte- grated circuit packaging, etc. Characterization is approached from the materials user's point of view. Thus, in general, the format is based on properties, processing steps, materials classification, etc., rather than on a technique. The emphasis of all vol- umes is on surfaces, interfaces, and thin films, but the emphasis varies depending on the relative importance of these areas for the materials class concerned. Appendixes